Author ORCID Identifier


Date of Award


Degree Type


Degree Name

Doctor of Philosophy (PhD)


Physics and Astronomy

First Advisor

Sidong Lei

Second Advisor

Unil Perera

Third Advisor

Vadym Apalkov

Fourth Advisor

Mukesh Dhamala


This research mainly focuses on the fabrication of miniature flexible devices empowered by van der Waals materials. Through the extensive experiments contained in this thesis, by exploring the characteristics of van der Waals materials, optimizing the manufacturing process of lithography technology, and characterizing the photoelectric performance of micro devices, this thesis has promoted the development of micro flexible device manufacturing and expanded its applications in the fields of biological detection, medical treatment, and environmental monitoring. We introduced a miniature van der Waals semiconductor empowered vertical color sensor, which saves three times the volume space compared to the traditional planer color sensor and includes multiple optical aberration correction functions as well. Such a small red, green, and blue (RGB) color sensor can be applied in bionic eyes, breaking through the limitations of existing black and white recognition. On this basis, we further explored the stretchability of two-dimensional materials represented by MoS2. We proposed a chemical treatment method combined with gold nanoparticles and (3-mercaptopropyl)trimethoxysilane (MPTMS) to realize the relocation of flexible micro devices. This method improves the adhesion between the material layer and the flexible substrate (PDMS), which significantly increases the flexible device stretchability, and prolongs its service life. Through the above work, this thesis explores the van der Waals materials’ properties, and optimizes the manufacturing process of micro devices, further exerts the advantages of material flexibility, therefore provides more possibilities for the development of smart wearable devices, biomedical detection, and other fields.


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